Persistent URL of this record https://hdl.handle.net/1887/59812
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Saturation of front propagation in a reaction diffusion process describing plasma damage in porous low-k materials
- All authors
- Safaverdi, S.; Barkema, G.T.; Kunnen, E.; Urbanowicz, A.M.; Maes, C.
- Date
- 2011
- Journal
- PHYSICAL REVIEW B
- Volume
- 83
- Issue
- 24
- Pages
- 245320