This thesis explores interfacial conductance and electric field-effects in LaAlO3/SrTiO3 heterostructures. High quality epitaxial LaAlO3 films were grown on SrTiO3 substrates by 90° off-axis sputter... Show moreThis thesis explores interfacial conductance and electric field-effects in LaAlO3/SrTiO3 heterostructures. High quality epitaxial LaAlO3 films were grown on SrTiO3 substrates by 90° off-axis sputter deposition. The conductance properties of the interfaces were modulated by applying external electric fields in different geometries, namely back-gating (applying an electric field to the back side of the substrate) and ionic liquid gating (which applies an electric field on the side of the LaAlO3). Show less
In this thesis I present my research on the physics of some important processes in the production of thin films. I studied physical vapour deposition (PVD) and thin film modification through ion... Show moreIn this thesis I present my research on the physics of some important processes in the production of thin films. I studied physical vapour deposition (PVD) and thin film modification through ion bombardment using a newly developed, high-speed scanning tunneling microscope (STM). The instrument has the special property that it can be tilted and azimuthally rotated to allow atom or ion beams a direct line-of-sight access to the region of the surface that is being imaged by the STM tip. With the microscope I have recorded STM movies (available as supplementary material) that offer a unique insight into the atomic surface processes that occur during thin film growth and ion beam sputtering. The __real-time STM__ was applied to the study of some key steps in the fabrication of Mo-Si multilayer optical coatings. I have investigated the non-idealities of these optics, i.e. the alloying of Mo and Si during deposition and the surface roughness formation of a deposited layer. Furthermore, I successfully used the STM to find a possibility to smooth a rough Mo layer after its deposition by means of ion bombardment. Show less
