One of the important properties of galaxies is their sizes which correlate with their stellar masses. Evidence is provided by many recent studies that the sizes of galaxies were smaller at higher... Show moreOne of the important properties of galaxies is their sizes which correlate with their stellar masses. Evidence is provided by many recent studies that the sizes of galaxies were smaller at higher redshifts compared to galaxies of similar mass in the local Universe. It is essential to understand which physical processes could explain the evolution of galaxy properties and the growth of the galaxies with time. Among different proposed scenarios, each mechanism could affect differently on the growth of stellar mass and hence sizes of galaxies. Consequently, determining these properties is essential to constrain the plausible model(s) for describing galaxy evolution. In this thesis, I will present the study of the mass-size evolution of galaxies from z=7 to z=1. I will also present the stellar mass-size relation for nearby galaxies (z=0), for samples selected using different criteria down to the stellar mass of 10^{9} solar mass. The robustness of size measurement techniques for z=0 and z=1 galaxies is also studied in details. Show less