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- Applied_Physics_Letters_103oe2013oe221909
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The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes
- All authors
- Tran, A.T.; Pandraud, G.; Tichelaar, F.D.; Nguyen, M.D.; Schellevis, H.; Sarro, P.M.
- Date
- 2013-11-25
- Journal
- APPLIED PHYSICS LETTERS
- Volume
- 103
- Issue
- 22
- Pages
- 221909