Saturation of front propagation in a reaction diffusion process describing plasma damage in porous low-k materials

Safaverdi, S.; Barkema, G.T.; Kunnen, E.; Urbanowicz, A.M.; Maes, C. (2011)

Article / Letter to editor

• All authors: Safaverdi, S.; Barkema, G.T.; Kunnen, E.; Urbanowicz, A.M.; Maes, C.
• Date: 2011
• Journal: PHYSICAL REVIEW B
• Volume: 83
• Issue: 24
• Patent number: JUN 28
• Pages: 245320
• DOI: doi:10.1103/PhysRevB.83.245320
• Link: https://journals.aps.org/prb/abstract/10.1103/PhysRevB.83.245320