Formation of epitaxial β-FeSi2 films on Si(001) as studied by medium-energy ion scattering

Author(s):
Konuma, K.; Vrijmoeth, J.; Zagwijn, P.M.; Frenken, J.W.M.; Vlieg, E.; Veen, J.F. van der
Published
1993
Publication type
Article / Letter to editor
Date issued
1993
Language
English
Is part of
Journal of Applied Physics (1993), Vol. 73, no. 3, p. 1104-1109
hdl
1887/62910
doi
10.1063/1.353273