A compact multipurpose nanomanipulator for use inside a scanning electron microscope

Author(s):
Heeres, E.C.; Katan, A.J.; Es, M.H. van; Beker, A.F.; Hesselberth, M.B.S.; Zalm, D.J. van der; Oosterkamp, T.H. (0000-0001-6855-5190)
Published
2010
Publication type
Article / Letter to editor
Date issued
2010
Language
English
Is part of
Review of Scientific Instruments (2010), Vol. 81, p. 023704
hdl
1887/61346
doi
10.1063/1.3271033