MEMS-based high speed scanning probe microscopy
- Author(s):
- Disseldorp, E.C.M.; Tabak, F.C.; Wortel, G.H.; Katan, A.J.; Hesselberth, M.B.S.; Oosterkamp, T.H. (0000-0001-6855-5190); Frenken, J.W.M.; Spengen, W.M. van
- Published
- 2010
- Publication type
- Article / Letter to editor
- Date issued
- 2010
- Language
- English
- Is part of
- Review of Scientific Instruments (2010), Vol. 81, no. 4, p. 043702
- hdl
- 1887/61345
- doi
- 10.1063/1.3361215
- URL
- https://aip.scitation.org/doi/10.1063/1.3361215
