Response to "Comment on 'MEMS-based high speed scanning probe microscopy"

Author(s):: Disseldorp, E.C.M.; Tabak, F.C.; Katan, A.J.; Hesselberth, M.B.S.; Oosterkamp, T.H. (0000-0001-6855-5190); Frenken, J.W.M.; Spengen, W.M. van

Published: 2010
Publication type: Article / Letter to editor

Date issued: 2010
Language: English
Is part of: Review of Scientific Instruments (2010), Vol. 81, no. 11, p. 117102
hdl: 1887/61308
doi: 10.1063/1.3499235
URL: https://aip.scitation.org/doi/10.1063/1.3499235