Saturation of front propagation in a reaction diffusion process describing plasma damage in porous low-k materials

Author(s):: Safaverdi, S.; Barkema, G.T.; Kunnen, E.; Urbanowicz, A.M.; Maes, C.

Published: 2011
Publication type: Article / Letter to editor

Date issued: 2011
Language: English
Is part of: PHYSICAL REVIEW B (2011), Vol. 83, no. 24, p. 245320
hdl: 1887/59991
doi: 10.1103/PhysRevB.83.245320
URL: https://journals.aps.org/prb/abstract/10.1103/PhysRevB.83.245320