Persistent URL of this record https://hdl.handle.net/1887/55515
Documents
-
- Download
- Nature_Communications_7oe2016oe10733
- Not Applicable (or Unknown)
- open access
- Full text at publishers site
In Collections
This item can be found in the following collections:
Thermodynamics of deposition flux-dependent intrinsic film stress
- All authors
- Saedi, A.; Rost, M.J.
- Date
- 2016
- Journal
- Nature Communications
- Volume
- 7
- Pages
- 10733