Thermodynamics of deposition flux-dependent intrinsic film stress

Author(s):: Saedi, A. (0000-0003-2152-0163); Rost, M.J.

Published: 2016
Publication type: Article / Letter to editor

Date issued: 2016
Language: English
Is part of: Nature Communications (2016), Vol. 7, p. 10733
hdl: 1887/55515
doi: 10.1038/ncomms10733
URL: https://arxiv.org/abs/1508.04059