Low-energy electron (0-100eV) interaction with resists using LEEM

Author(s):: Thete, A.; Geelen, D. (0000-0003-3571-3898); Wuister, S.; Molen, S.J. van der (0000-0003-3181-2055)

Published: 2015
Publication type: Article / Letter to editor

Date issued: 2015
Language: English
hdl: 1887/3198190