The dynamics of plasma-surface interaction

Abstract

The thesis __The Dynamics of Plasma Surface Interaction__ described the experimental and simulated results involving the interactions of plasma with surfaces. In the first part, we introduced low energy ion grazing scattering technique to characterize in-situ and real-time the plasma surface interaction. The experimental results demonstrate that low energy ion grazing scattering is a viable tool for in-situ monitoring of the interaction of plasma with surfaces. In order to interpret the scattering experimental data, the MD simulations were performed to investigate the dynamics of Ar grazing scattering from perfect and defective Si (100) surfaces. A new model including electron stopping is developed. The results based on this model are in reasonable with the experiments. In simulations of CF grazing scattering from Si(100) surfaces, the translational energy loss of CF, the redistribution of the gained internal modes and the stereodynamics of surviving molecules are discussed. The second part is to focus on modeling of plasma-surface interactions. The interaction of CF with the clean Si(100)-(2x1) surface at normal incidence and room temperature was investigated using molecular dynamics simulation. Some simulated results are in good agreement with available experimental data. The level of agreement between the simulated and experimental results and the limitation of MD simulation are discussed. MD simulations of the CHB3B interaction with Si (100) show the H/C ratio obtained from the simulations is in good agreement with available experimental data. H atoms preferentially react with Si. SiH is the dominant form of SiHBxB generated.